Development of a compact permanent magnet helicon plasma source for ion beam bioengineering

Journal Article · Sat Oct 15 04:00:00 EDT 2011 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3646467· OSTI ID:22085910

Kerdtongmee, P; Srinoum, D; Nisoa, M ^[1]

---

1. Plasma Technology for Agricultural Applications Research Laboratory, School of Science, Walailak University, Nakhon Si Thammarat 80161 (Thailand)

A compact helicon plasma source was developed as a millimeter-sized ion source for ion beam bioengineering. By employing a stacked arrangement of annular-shaped permanent magnets, a uniform axial magnetic flux density up to 2.8 kG was obtained. A cost effective 118 MHz RF generator was built for adjusting forward output power from 0 to 40 W. The load impedance and matching network were then analyzed. A single loop antenna and circuit matching elements were placed on a compact printed circuit board for 50 {Omega} impedance matching. A plasma density up to 1.1 x 10{sup 12} cm{sup -3} in the 10 mm diameter tube under the magnetic flux density was achieved with 35 W applied RF power.

• OSTI ID: 22085910
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 10 Vol. 82; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
ANTENNAS
COST
FLUX DENSITY
ION BEAMS
ION SOURCES
MAGNETIC FLUX
MHZ RANGE
PERMANENT MAGNETS
PLASMA
PLASMA DENSITY
PRINTED CIRCUITS
RF SYSTEMS