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Mg acceptor doping of In{sub 2}O{sub 3} and overcompensation by oxygen vacancies

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4751854· OSTI ID:22080422
;  [1]
  1. Department of Materials, University of California, Santa Barbara, California 93106 (United States)
Mg-doped indium oxide (In{sub 2}O{sub 3}) thin films were grown by plasma-assisted molecular beam epitaxy with Mg-concentrations ranging from 10{sup 17} to 6 Multiplication-Sign 10{sup 20} cm{sup -3}. In this concentration range Mg was incorporated into In{sub 2}O{sub 3} without discernable impediment nor formation of secondary phases. Despite the role of Mg as acceptor, the films were n-type conductive in the as-grown state or after annealing in vacuum. For Mg-concentrations well in excess of the unintentional donor concentration annealing in oxygen resulted in semi-insulating films without detectable p-type conductivity. These results strongly suggest oxygen vacancies to act as shallow donors in In{sub 2}O{sub 3} that can overcompensate the Mg acceptors.
OSTI ID:
22080422
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 10 Vol. 101; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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