Magnetron sputtering system for fabrication of X-ray multilayer optics
Journal Article
·
· AIP Conference Proceedings
- X-ray Optics Section, Indus Synchrotrons Utilization Division, Raja Ramanna Centre For Advanced Technology, Indore-452013 (India)
A specially designed DC/RF magnetron sputtering system has been installed for the development of large area x-ray multilayer (ML) optics at Indus synchrotron radiation facility. A brief description of the system configuration, automation and operating conditions are presented. The system has the capability of fabricating large area (300 Multiplication-Sign 100-mm{sup 2}) X-ray MLs with required accuracy, uniformity and reproducibility. Thin film growth suitable for fabrication of X-ray ML optics has achieved by optimizing the sputtering process parameters. The representative results are presented.
- OSTI ID:
- 22068988
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1451; ISSN 0094-243X; ISSN APCPCS
- Country of Publication:
- United States
- Language:
- English
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