Time dependent behaviors of ion-ion plasmas exposed to various voltage waveforms in the kilohertz to megahertz frequency range

Journal Article · Mon Oct 15 04:00:00 EDT 2012 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4762855· OSTI ID:22068849

Oudini, N; Raimbault, J -L; Chabert, P; Aanesland, A ^[1]; Garrigues, L ^[2]; Meige, A ^[3]

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1. Laboratoire de Physique des Plasmas, CNRS, Ecole Polytechnique, 91128 Palaiseau Cedex (France)
2. LAPLACE (Laboratoire Plasma et Conversion d'Energie), Universite de Toulouse, UPS, INPT Toulouse, 118 route de Narbonne, F-31062 Toulouse cedex 9 (France)
3. PRESANS/X-Technologies/Ecole Polytechnique, 91128 Palaiseau Cedex (France)

An ion-ion plasma, situated between two parallel electrodes, is studied with the use of a time dependent one-dimensional particle-in-cell Monte-Carlo collisions model. This plasma consists of only positively and negatively singly charged ions with the same order of mass and temperature (the electron density is zero). The right electrode is grounded, and the left electrode is biased with a voltage waveform varying from sinusoidal to square with the frequency in the kHz to MHz range. The sheath evolution and the particle flux towards the electrodes, as a function of both space and time, are investigated for the various waveforms and frequencies. The sheath evolution has a strong influence on the time averaged ion energy distribution function (IEDF). The IEDF is broad with a low energy tail for low frequency sinusoidal biases (25 kHz) while peaked at low energy for higher frequencies (2 MHz). For square waveforms, the IEDF is mono-energetic with some broadening when the rise time is faster than the typical time to establish the steady state sheath formation (<0.3 {mu}s).

• OSTI ID: 22068849
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 10 Vol. 19; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRIC POTENTIAL
ELECTRODES
ENERGY SPECTRA
IONS
KHZ RANGE
MHZ RANGE
MONTE CARLO METHOD
ONE-DIMENSIONAL CALCULATIONS
PLASMA
PLASMA SHEATH
PULSE RISE TIME
STEADY-STATE CONDITIONS
TIME DEPENDENCE
WAVE FORMS