Development of a new dynamic gas flow-control system in the pressure range of 1 Pa-133 Pa

Journal Article · Thu Dec 15 00:00:00 EST 2011 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3672999· OSTI ID:22062396

Hong, S S; Chung, J W ^[1]; Khan, Wakil ^[2]

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1. Korea Research Institute of Standards and Science, Daejeon 305-340 (Korea, Republic of)
2. Pakistan Vacuum Society, street 17, Islamabad (Pakistan)

A new flow-control system (FCS-705) has been developed at Korea Research Institute of Standards and Science. The system is intended for calibration of vacuum gauges in the pressure range of 1 Pa-133 Pa by comparison method. This paper describes some basic characteristics of the system including; (1) the design and construction of the system, (2) the generation of stable pressures in the chamber, (3) achieving high upstream pressure limit by installing a short duct in the by-pass pumping line, and (4) investigation of the gas flow regimes within the short duct.

• OSTI ID: 22062396
• Journal Information: Review of Scientific Instruments, Vol. 82, Issue 12; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
CALIBRATION
CONTROL SYSTEMS
DESIGN
GAS FLOW
PRESSURE RANGE PA
PUMPING
VACUUM GAGES