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Title: Development of a synchrotron biaxial tensile device for in situ characterization of thin films mechanical response

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.3488628· OSTI ID:22055742
 [1]; ;  [2]; ; ; ;  [3]; ; ; ; ; ;  [1];  [4]
  1. Departement PMM, Institut Pprime, UPR 3346 CNRS, Universite de Poitiers-ENSMA, SP2MI, Teleport 2, Boulevard Marie et Pierre Curie, BP 30179-86962 Futuroscope Chasseneuil Cedex (France)
  2. Synchrotron SOLEIL, L'Orme des Merisiers, BP 48, 91192 Gif sur Yvette (France)
  3. LPMTM, UPR 9001 CNRS, Universite Paris-Nord, 93430 Villetaneuse (France)
  4. LMT Cachan, 61 Avenue du President Wilson, 94235 Cachan Cedex (France)

We have developed on the DIFFABS-SOLEIL beamline a biaxial tensile machine working in the synchrotron environment for in situ diffraction characterization of thin polycrystalline films mechanical response. The machine has been designed to test compliant substrates coated by the studied films under controlled, applied strain field. Technological challenges comprise the sample design including fixation of the substrate ends, the related generation of a uniform strain field in the studied (central) volume, and the operations from the beamline pilot. Preliminary tests on 150 nm thick W films deposited onto polyimide cruciform substrates are presented. The obtained results for applied strains using x-ray diffraction and digital image correlation methods clearly show the full potentialities of this new setup.

OSTI ID:
22055742
Journal Information:
Review of Scientific Instruments, Vol. 81, Issue 10; Other Information: (c) 2010 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English