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Biaxial Fatigue Testing of Thin Films

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.2173536· OSTI ID:20798203
; ; ;  [1]; ;  [2]
  1. Institut fuer Materialforschung II, Forschungszentrum Karlsruhe GmbH, Postfach 36 40, 76021 Karlsruhe (Germany)
  2. Institut fuer Mikrostrukturtechnik, Forschungszentrum Karlsruhe GmbH, Postfach 36 40, 76021 Karlsruhe (Germany)

A new experimental setup, which allows for testing in an equi-biaxial loading condition, has been developed and applied to investigate the fatigue behaviour of thin films. A load controlled cycling, performed at room temperature on flat specimens, reproduces the strain amplitude and mean strain in the film corresponding to a thermal cycling in a given temperature range. The setup is based on the ring-on-ring test, which has been successfully used in biaxial fracture testing of glass and ceramics, and includes an optical in-situ failure detection system. The method is validated for specimens consisting in a gold film deposited on a polymer substrate.

OSTI ID:
20798203
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 817; ISSN APCPCS; ISSN 0094-243X
Country of Publication:
United States
Language:
English

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