X-ray scattering by porous silicon modulated structures

Journal Article · Thu Mar 15 00:00:00 EDT 2012 · Crystallography Reports

DOI:https://doi.org/10.1134/S1063774511060162· OSTI ID:22054192

Punegov, V I ^[1]; Karavanskii, V A ^[2]; Vasil'ev, A L ^[3]

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1. Russian Academy of Sciences, Komi Research Center, Ural Branch (Russian Federation)
2. Russian Academy of Sciences, Prokhorov General Physics Institute (Russian Federation)
3. Russian Academy of Sciences, Shubnikov Institute of Crystallography (Russian Federation)

A multilayered porous structure formed as a result of the anodization of a Si(111)(Sb) substrate in an HF:C{sub 2}H{sub 5}OH (1: 2) solution with a periodically alternating current has been investigated by high-resolution X-ray diffraction. It is established that, despite 50% porosity, a thickness of 30 {mu}m, and significant strain (4 Multiplication-Sign 10{sup -3)}, the porous silicon structure consists mainly of coherent crystallites. A model of coherent scattering from a multilayered periodic porous structure is proposed within the dynamic theory of diffraction. It is shown that the presence of gradient strains of 5 Multiplication-Sign 10{sup -4} or higher leads to phase loss upon scattering from porous superlattices and the suppression of characteristic satellites in rocking curves.

• OSTI ID: 22054192
• Journal Information: Crystallography Reports, Vol. 57, Issue 2; Other Information: Copyright (c) 2012 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7745
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALTERNATING CURRENT
ANODIZATION
ANTIMONY 111
HYDROFLUORIC ACID
NEUTRON DIFFRACTION
PERIODICITY
POROSITY
POROUS MATERIALS
SILICON
SOLUTIONS
STRAINS
SUPERLATTICES
X-RAY DIFFRACTION