X-ray scattering by porous silicon modulated structures
Journal Article
·
· Crystallography Reports
- Russian Academy of Sciences, Komi Research Center, Ural Branch (Russian Federation)
- Russian Academy of Sciences, Prokhorov General Physics Institute (Russian Federation)
- Russian Academy of Sciences, Shubnikov Institute of Crystallography (Russian Federation)
A multilayered porous structure formed as a result of the anodization of a Si(111)(Sb) substrate in an HF:C{sub 2}H{sub 5}OH (1: 2) solution with a periodically alternating current has been investigated by high-resolution X-ray diffraction. It is established that, despite 50% porosity, a thickness of 30 {mu}m, and significant strain (4 Multiplication-Sign 10{sup -3)}, the porous silicon structure consists mainly of coherent crystallites. A model of coherent scattering from a multilayered periodic porous structure is proposed within the dynamic theory of diffraction. It is shown that the presence of gradient strains of 5 Multiplication-Sign 10{sup -4} or higher leads to phase loss upon scattering from porous superlattices and the suppression of characteristic satellites in rocking curves.
- OSTI ID:
- 22054192
- Journal Information:
- Crystallography Reports, Journal Name: Crystallography Reports Journal Issue: 2 Vol. 57; ISSN 1063-7745; ISSN CYSTE3
- Country of Publication:
- United States
- Language:
- English
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