Abatement of CF{sub 4} and CHF{sub 3} byproducts using low-pressure plasmas generated by annular-shaped electrodes

Journal Article · Thu Mar 15 04:00:00 EDT 2012 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3679407· OSTI ID:22054148

Hur, Min; Lee, Jae O. K.; Hoon Song, Young; Yoo, Hoon A ^[1]

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1. Environmental Systems Research Division, Korea Institute of Machinery and Materials, 104 Sinseongno, Yuseong-gu, Daejeon 305-343 (Korea, Republic of)

Three different driving schemes are tested for a plasma reactor designed to abate the greenhouse gases emitted by the semiconductor industry. The reactor and electrodes all have a concentric annular shape, which allows them to be easily connected to pre-existing pipelines without any disturbance to the exhaust stream. The destruction and removal efficiencies are measured for CF{sub 4} by varying the O{sub 2}/CF{sub 4} ratio and pressure. The influences of adding O{sub 2} and H{sub 2}O to the byproducts of the CHF{sub 3} abatement process are investigated by analyzing the spectra resulting from Fourier transform infrared spectroscopy measurements. Based on the experimental results we suggest an appropriate combination of driving scheme and reactant gas species for efficient and economical abatement of a mixture of CHF{sub 3} and CF{sub 4}. Then, the optimal flow rate of the reactant gas is presented. Finally, the reduction rates for global warming emissions are estimated to demonstrate the feasibility of using our device for abatement of greenhouse gases emitted by the semiconductor industry.

• OSTI ID: 22054148
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 2 Vol. 30; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

54 ENVIRONMENTAL SCIENCES
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
AIR POLLUTION ABATEMENT
CARBON TETRAFLUORIDE
DISTURBANCES
EFFICIENCY
ELECTRODES
FLOW RATE
FLUOROFORM
FOURIER TRANSFORM SPECTROMETERS
GREENHOUSE EFFECT
GREENHOUSE GASES
INFRARED SPECTRA
OXYGEN
PLASMA
PLASMA FURNACES
SEMICONDUCTOR MATERIALS
WATER