Structure and properties of ZrN doped diamondlike carbon films prepared by pulsed bias arc ion plating
- Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, 116085 Dalian (China)
ZrN doped diamondlike carbon composite films with different compositions were deposited on cemented carbide substrates at different nitrogen flow rates by pulsed bias arc ion plating. Scanning electron microscopy results show that the film surfaces were all uniform, smooth, and dense. X-ray photoelectron spectroscopy reveal the C contents are more than 60%, the N content increases, and the Zr content decreases with increasing nitrogen flow rate. The Raman spectra indicated that the deposited films were diamondlike carbon. X-ray diffraction results suggested that a ZrN crystalline phase was also present in the films. The hardness and elastic modulus were closely related to the composition and structure of the films and decrease with increasing nitrogen flow rates, principally due to the increase in the sp{sup 2} content and the decrease in the ZrN crystalline phase.
- OSTI ID:
- 22053547
- Journal Information:
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 27, Issue 6; Other Information: (c) 2009 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CERMETS
CRYSTAL GROWTH
DIAMONDS
DOPED MATERIALS
FLOW RATE
HARDNESS
IONS
NITROGEN
PLATING
RAMAN SPECTRA
SCANNING ELECTRON MICROSCOPY
SUBSTRATES
SURFACES
THIN FILMS
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY
ZIRCONIUM NITRIDES