Thermal stability of sputter deposited nanomosaic rutile TiO{sub 2}

Journal Article · Wed Jul 15 04:00:00 EDT 2009 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3139900· OSTI ID:22053494

Aita, Carolyn Rubin ^[1]

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1. Department of Materials and the Advanced Coatings Experimental Laboratory, College of Engineering and Applied Science, University of Wisconsin-Milwaukee, P.O. Box 784, Milwaukee, Wisconsin 53201 (United States)

A domain structure based on the rutile lattice with a large density of (1/2)<011>{l_brace}011{r_brace}-type stacking faults is found in sputter deposited TiO{sub 2} films [J. Vac. Sci. Technol. A 24, 2054 (2006)]. The thermal stability of nanomosaic rutile at moderate temperature is reported here. Films are annealed at 973 K for 0.25-15 h, characterized by x-ray diffraction. A Johnson-Mehl-Avrami-Kolmogorov analysis indicates impeded crystallite growth. A dislocation-locking mechanism is proposed for this behavior. Partial dislocations with (1/2)<011> Burgers vectors that bound the stacking faults glide on intersecting {l_brace}011{r_brace} slip planes and react to produce sessile stair rod dislocations. Without the high temperature required for dislocation climb, (1/2)<011>{l_brace}011{r_brace}-type faults inherent to nanomosaic rutile provide thermal stability against massive crystallite growth.

• OSTI ID: 22053494
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 4 Vol. 27; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
77 NANOSCIENCE AND NANOTECHNOLOGY
ANNEALING
BURGERS VECTOR
CRYSTAL GROWTH
DENSITY
DEPOSITION
DISLOCATIONS
DOMAIN STRUCTURE
NANOSTRUCTURES
PHASE STABILITY
RUTILE
SLIP
SPUTTERING
STACKING FAULTS
THIN FILMS
TITANIUM OXIDES
X-RAY DIFFRACTION