Nitrogen stabilized reactive sputtering of optimized TiO{sub 2-x} photocatalysts with visible light reactivity

Journal Article · Wed Jul 15 00:00:00 EDT 2009 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3139906· OSTI ID:22050999

Chen, Le; Graham, Michael E; Gray, Kimberly A ^[1]

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1. Department of Civil and Environmental Engineering, Northwestern University, Evanston, Illinois 60208 (United States)

Photoreactive and visible light responsive nonstoichiometric mixed-phase titania was prepared by reactive direct current magnetron sputtering. Trace amounts of nitrogen were added for process stabilization without being incorporated into the films. Based on the CO{sub 2} photoreduction tests and structural and optical characterization, the influence of the trace nitrogen on the sputtered nonstoichiometric TiO{sub 2} was studied and was compared to nitrogen-doped titania.

• OSTI ID: 22050999
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 4 Vol. 27; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
CARBON DIOXIDE
CATALYSTS
CRYSTAL GROWTH
DEPOSITION
DIRECT CURRENT
DOPED MATERIALS
NITROGEN
PHOTOCHEMISTRY
REACTIVITY
SEMICONDUCTOR MATERIALS
SPUTTERING
STABILIZATION
STOICHIOMETRY
THIN FILMS
TITANIUM OXIDES
TRACE AMOUNTS
VISIBLE RADIATION