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Probing buried layers by photoelectron spectromicroscopy with hard x-ray excitation

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4722940· OSTI ID:22025573
; ;  [1]; ;  [2];  [3]; ;  [4];  [1]
  1. Peter Gruenberg Institute (PGI-6) and JARA-FIT, Research Centre Juelich, D-52425 Juelich (Germany)
  2. FOCUS GmbH, D-65510 Huenstetten (Germany)
  3. Institut fuer Anorganische Chemie und Analytische Chemie, Johannes Gutenberg-Universitaet Mainz, D-55128 Mainz (Germany)
  4. DESY Photon Science, Deutsches Elektronen-Synchrotron, D-22603 Hamburg (Germany)

We report about a proof-of-principle experiment which explores the perspectives of performing hard x-ray photoemission spectromicroscopy with high lateral resolution. Our results obtained with an energy-filtered photoemission microscope at the PETRA III storage ring facility using hard x-ray excitation up to 6.5 keV photon energy demonstrate that it is possible to obtain selected-area x-ray photoemission spectra from regions less than 500 nm in diameter.

OSTI ID:
22025573
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 22 Vol. 100; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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