Effect of helium on spatial plasma parameters in low pressure argon-helium plasma
- Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)
Spatial distributions of the electron energy probability function were measured using a Langmuir probe in side-type argon-helium inductively coupled plasma. Collisional dominated electron heating and a concave shape of plasma density profile were observed at 10 mTorr pure argon. As the helium proportion increased, the electron heating and density profile changed to collisionless dominated heating and a convex shape respectively, and the same tendency was shown when the pressure decreased in the pure argon plasma. These changes were due to the decrease in the e-n collision frequency and the expansion of the electron power dissipation region.
- OSTI ID:
- 22025526
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 16 Vol. 100; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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