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Electrical characteristics of Au/n-GaAs structures with thin and thick SiO{sub 2} dielectric layer

Journal Article · · Semiconductors
 [1];  [2];  [3]; ;  [2]
  1. Cankiri Karatekin University, Department of Physics, Faculty of Sciences (Turkey)
  2. Gazi University, Department of Physics, Faculty of Arts and Sciences (Turkey)
  3. Kirklareli University, Department of Physics, Faculty of Arts and Sciences (Turkey)

The aim of this study, to explain effects of the SiO{sub 2} insulator layer thickness on the electrical properties of Au/n-GaAs Shottky barrier diodes (SBDs). Thin (60 A) and thick (250 A) SiO{sub 2} insulator layers were deposited on n-type GaAs substrates using the plasma enganced chemical vapour deposition technique. The current-voltage (I-V) and capacitance-voltage (C-V) characteristics have been carried out at room temperature. The main electrical parameters, such as ideality factor (n), zero-bias barrier height ({phi}{sub Bo}), series resistance (R{sub s}), leakage current, and interface states (N{sub ss}) for Au/SiO{sub 2}/n-GaAs SBDs have been investigated. Surface morphologies of the SiO{sub 2} dielectric layer was analyzed using atomic force microscopy. The results show that SiO{sub 2} insulator layer thickness very affects the main electrical parameters. Au/n-GaAs SBDs with thick SiO{sub 2} insulator layer have low leakage current level, small ideality factor, and low interface states. Thus, Au/n-GaAs SBDs with thick SiO{sub 2} insulator layer shows better diode characteristics than other.

OSTI ID:
22004724
Journal Information:
Semiconductors, Journal Name: Semiconductors Journal Issue: 10 Vol. 45; ISSN SMICES; ISSN 1063-7826
Country of Publication:
United States
Language:
English