Optical characteristics of pulsed laser deposited Ge-Sb-Te thin films studied by spectroscopic ellipsometry

Journal Article · Fri Apr 01 04:00:00 EDT 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3569865· OSTI ID:21538221

Nemec, P ^[1]; Prikryl, J; Frumar, M ^[2]; Nazabal, V ^[3]

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1. Department of Graphic Arts and Photophysics, Faculty of Chemical Technology, University of Pardubice, Studentska 573, 53210 Pardubice (Czech Republic)
2. Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Studentska 573, 53210 Pardubice (Czech Republic)
3. Equipe Verres et Ceramiques, UMR-CNRS 6226, Sciences Chimiques de Rennes (SCR), Universite de Rennes 1, 35042 Rennes Cedex (France)

Pulsed laser deposition technique was used for the fabrication of (GeTe){sub 1-x}(Sb{sub 2}Te{sub 3}){sub x} (x = 0, 0.33, 0.50, 0.66, and 1) amorphous thin films. Scanning electron microscopy with energy-dispersive x-ray analysis, x-ray diffraction, optical reflectivity, and sheet resistance temperature dependences as well as variable angle spectroscopic ellipsometry measurements were used to characterize as-deposited (amorphous) and annealed (rocksaltlike) layers. In order to extract optical functions of the films, the Cody-Lorentz model was applied for the analysis of ellipsometric data. Fitted sets of Cody-Lorentz model parameters are discussed in relation with chemical composition and the structure of the layers. The GeTe component content was found to be responsible for the huge optical functions and thickness changes upon amorphous-to-fcc phase transition.

• OSTI ID: 21538221
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 7 Vol. 109; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AMORPHOUS STATE
ANNEALING
ANTIMONY COMPOUNDS
ANTIMONY TELLURIDES
CHALCOGENIDES
COHERENT SCATTERING
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CRYSTAL-PHASE TRANSFORMATIONS
CUBIC LATTICES
DEPOSITION
DIFFRACTION
ELECTROMAGNETIC RADIATION
ELECTRON MICROSCOPY
ELLIPSOMETRY
ENERGY BEAM DEPOSITION
FCC LATTICES
FILMS
GERMANIUM COMPOUNDS
GERMANIUM TELLURIDES
HEAT TREATMENTS
IONIZING RADIATIONS
IRRADIATION
LASER RADIATION
LAYERS
MEASURING METHODS
MICROSCOPY
OPTICAL PROPERTIES
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
PULSED IRRADIATION
RADIATIONS
REFLECTIVITY
SCANNING ELECTRON MICROSCOPY
SCATTERING
SOLIDS
SURFACE COATING
SURFACE PROPERTIES
TELLURIDES
TELLURIUM COMPOUNDS
TEMPERATURE DEPENDENCE
THIN FILMS
X RADIATION
X-RAY DIFFRACTION