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Substrate orientation effects on the nucleation and growth of the M{sub n+1}AX{sub n} phase Ti{sub 2}AlC

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3527960· OSTI ID:21538037
The M{sub n+1}AX{sub n} (MAX) phases are ternary compounds comprising alternating layers of a transition metal carbide or nitride and a third ''A-group'' element. The effect of substrate orientation on the growth of Ti{sub 2}AlC MAX phase films was investigated by studying pulsed cathodic arc deposited samples grown on sapphire cut along the (0001), (1010), and (1102) crystallographic planes. Characterization of these samples was by x-ray diffraction, atomic force microscopy, and cross-sectional transmission electron microscopy. On the (1010) substrate, tilted (1018) growth of Ti{sub 2}AlC was found, such that the TiC octahedra of the MAX phase structure have the same orientation as a spontaneously formed epitaxial TiC sublayer, preserving the typical TiC-Ti{sub 2}AlC epitaxial relationship and confirming the importance of this relationship in determining MAX phase film orientation. An additional component of Ti{sub 2}AlC with tilted fiber texture was observed in this sample; tilted fiber texture, or axiotaxy, has not previously been seen in MAX phase films.
OSTI ID:
21538037
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 1 Vol. 109; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English