Interdiffusion and barrier layer formation in thermally evaporated Mn/Cu heterostructures on SiO{sub 2} substrates

Journal Article · Mon Mar 21 04:00:00 EDT 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3569146· OSTI ID:21518346

Lozano, J G ^[1]; Lozano-Perez, S; Nellist, P D ^[2]; Bogan, J; Brennan, B; Hughes, G ^[1]; Wang, Y C ^[3]

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1. School of Physical Science, Dublin City University, Glasnevin, Dublin 9, Dublin (Ireland)
2. Department of Materials, University of Oxford, Parks Road, OX13PH Oxford (United Kingdom)
3. FEI Company, Hillsboro, Oregon 097124 (United States)

Mn/Cu heterostructures thermally evaporated onto SiO{sub 2} and, subsequently, annealed were investigated by transmission electron microscopy related techniques in order to study the diffusion interactions which lead to barrier layer formation. Energy dispersive x-ray spectroscopy and electron energy loss spectroscopy provide evidence for the interdiffusion between the Mn and Cu layers following a 450 deg. C anneal, where the Mn diffuses toward the surface of the structure, while Cu diffuses toward the Mn/SiO{sub 2} but does not propagate into the dielectric. The chemical composition of the 2-3 nm interfacial layer is primarily a mixture of +2 and +3 Mn valences, in good agreement with previously reported results.

• OSTI ID: 21518346
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 12 Vol. 98; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANNEALING
CHALCOGENIDES
CHEMICAL ANALYSIS
CHEMICAL COMPOSITION
COPPER
DIELECTRIC MATERIALS
DIFFUSION
ELECTROMAGNETIC RADIATION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
ENERGY-LOSS SPECTROSCOPY
ENTHALPY
EVAPORATION
FORMATION HEAT
HEAT TREATMENTS
IONIZING RADIATIONS
LASER RADIATION
MANGANESE
MATERIALS
METALS
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
RADIATIONS
REACTION HEAT
SILICON COMPOUNDS
SILICON OXIDES
SPECTROSCOPY
SUBSTRATES
SURFACES
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
X RADIATION
X-RAY SPECTROSCOPY