skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Carbon-doped single-crystalline SiGe/Si thermistor with high temperature coefficient of resistance and low noise level

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3524211· OSTI ID:21518196
; ; ; ;  [1]
  1. School of Information and Communication Technology, KTH (Royal Institute of Technology), Isafjordsg. 22-26, Electrum 229, 16640 Kista (Sweden)

SiGe (C)/Si(C) multiquantum wells have been studied as a thermistor material for future bolometers. A thermistor material for uncooled Si-based thermal detectors with thermal coefficient of resistance of 4.5%/K for 100x100 {mu}m{sup 2} pixel sizes and low noise constant (K{sub 1/f}) value of 4.4x10{sup -15} is presented. The outstanding performance of the devices is due to Ni-silicide contacts, smooth interfaces, and high quality multiquantum wells containing high Ge content.

OSTI ID:
21518196
Journal Information:
Applied Physics Letters, Vol. 97, Issue 22; Other Information: DOI: 10.1063/1.3524211; (c) 2010 American Institute of Physics; ISSN 0003-6951
Country of Publication:
United States
Language:
English

Similar Records

Formation of nickel silicide and germanosilicide layers on Si(001), relaxed SiGe/Si(001), and strained Si/relaxed SiGe/Si(001) and effect of postthermal annealing
Journal Article · Sat Jul 15 00:00:00 EDT 2006 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films · OSTI ID:21518196

Chromium–niobium co-doped vanadium dioxide films: Large temperature coefficient of resistance and practically no thermal hysteresis of the metal–insulator transition
Journal Article · Sun May 15 00:00:00 EDT 2016 · AIP Advances · OSTI ID:21518196

Thermally Processed High-Mobility MOS Thin-Film Transistors on Transferable Single-Crystal Elastically Strain-Sharing Si/SiGe/Si Nanomembranes
Journal Article · Sat Mar 01 00:00:00 EST 2008 · IEEE Transactions on Electron Devices · OSTI ID:21518196