Effects of the shielding cylinder and substrate on the characteristics of an argon radio-frequency atmospheric glow discharge plasma jet

Journal Article · Sat May 15 04:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3427558· OSTI ID:21483618

Guo, Li; Peisi, Le; Heping, Li; Chengyu, Bao ^[1]

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1. Department of Engineering Physics, Tsinghua University, Beijing 100084 (China)

With unique features of low breakdown voltages, large and uniform discharge areas and high concentrations of chemically reactive species, radio-frequency, atmospheric-pressure glow discharge (rf APGD) plasma sources produced with bare-metallic electrodes have shown promising prospects in the field of materials processing. In this paper, the spatial distributions (i.e., the directly measured integrated axial distribution and the radial distribution by using the inverse Abel transform) of the emission intensities of the Ar I 696.5 nm line are studied for the argon rf APGD plasma jet under different operation conditions, including variations of the rf power input or the argon flow rate, the existence of the solid shielding cylinder or the substrate. The experimental results show that, with other parameters being unchanged, the emission intensities of the Ar I 696.5 nm line increase with increasing the rf power input or the argon flow rate; and the solid shielding cylinder has more significant influences on the characteristics of the plasma impinging jet by reducing the mass flow rate of the ambient air entrained into the plasma jet region than those for the cases without the existence of the substrate at the downstream of the plasma torch nozzle exit.

• OSTI ID: 21483618
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 10 Vol. 107; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
ATMOSPHERIC PRESSURE
DISTRIBUTION
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRODES
ELECTROMAGNETIC RADIATION
ELEMENTS
FLOW RATE
FLUIDS
GASES
GLOW DISCHARGES
HIGH-FREQUENCY DISCHARGES
NONMETALS
PLASMA
PLASMA DIAGNOSTICS
PLASMA JETS
PROCESSING
RADIATIONS
RADIOWAVE RADIATION
RARE GASES
SPATIAL DISTRIBUTION
SUBSTRATES