Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma

Journal Article · Fri Jan 15 04:00:00 EST 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3268462· OSTI ID:21480225

Gielissen, K; Sidelnikov, Y ^[1]; Glushkov, D; Banine, V ^[2]; Soer, W A ^[3]

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1. ISAN Institute of Spectroscopy, Fizicheskaya Str. 5, Troitsk, Moscow Region 142190 (Russian Federation)
2. ASML, De Run 6501, 5504 DR Veldhoven (Netherlands)
3. Philips Research, High Tech Campus 4, 5656 AE Eindhoven (Netherlands)

The ion emission of a Sn-based discharge produced extreme ultraviolet producing plasma is characterized with the combined use of different time-of-flight techniques. An electrostatic ion spectrometer is employed to measure the average charge distribution of the emitted Sn ions. A dedicated Faraday cup configuration is used to measure the total ion flux from the source for different discharge energies. High-energy Sn ions emitted by the plasma with energies up to 100 keV have been identified. The number of high-energy ions increases for higher electrical input energy into the plasma while the signal associated with the expanding plasma ions does not show such dependence. The ion energy distribution for a bulk of detected ions is calculated based on the Faraday cup measurements and compared with theoretical plasma expansion dynamics.

• OSTI ID: 21480225
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 1 Vol. 107; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM MONITORS
CHARGE DISTRIBUTION
CHARGED PARTICLES
ELECTRIC DISCHARGES
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
ENERGY RANGE
ENERGY SPECTRA
EXPANSION
EXTREME ULTRAVIOLET RADIATION
FARADAY CUPS
ION EMISSION
IONS
KEV RANGE
MEASURING INSTRUMENTS
METALS
MONITORS
PLASMA
PLASMA DIAGNOSTICS
PLASMA EXPANSION
RADIATIONS
SPECTRA
TIME-OF-FLIGHT METHOD
TIN
TIN IONS
ULTRAVIOLET RADIATION