Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

Journal Article · Thu Oct 15 04:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3239994· OSTI ID:21361880

Gielissen, K; Sidelnikov, Y ^[1]; Glushkov, D; Banine, V ^[2]; Soer, W A ^[3]

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1. ISAN Institute of Spectroscopy, Fizicheskaya Str. 5, Troitsk, Moscow Region 142190 (Russian Federation)
2. ASML, De Run 6501, 5504 DR Veldhoven (Netherlands)
3. Philips Research, High Tech Campus 4, 5656 AE Eindhoven (Netherlands)

The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an optional magnetic field allows mass-to-charge analysis of the first part of the Faraday cup signal. It is shown that this consists mainly of oxygen ions emitted from a region near the cathode. Time-resolved images of Sn ions with a kinetic energy of 45 keV visualize the regions in between the electrodes where the high-energy ion generation takes place.

• OSTI ID: 21361880
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 106; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM MONITORS
CATHODES
CHARGED PARTICLES
ELECTRIC DISCHARGES
ELECTRODES
ELECTROMAGNETIC RADIATION
EMISSION
ENERGY
ENERGY RANGE
EXTREME ULTRAVIOLET RADIATION
FARADAY CUPS
ION EMISSION
IONS
KEV RANGE
KEV RANGE 10-100
KINETIC ENERGY
MAGNETIC FIELDS
MEASURING INSTRUMENTS
MONITORS
OXYGEN IONS
PLASMA PRODUCTION
RADIATIONS
RESOLUTION
TIME RESOLUTION
TIME-OF-FLIGHT METHOD
TIMING PROPERTIES
TIN IONS
ULTRAVIOLET RADIATION