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Light-induced point defect reactions of residual iron in crystalline silicon after aluminum gettering

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3474658· OSTI ID:21476426
; ; ;  [1]
  1. IV. Physikalisches Institut der Georg-August-Universitaet Goettingen, Friedrich-Hund-Platz 1, D-37077 Goettingen (Germany)
Deep level transient spectroscopy is used to study light-induced reactions of residual iron impurities after aluminum gettering (AlG) in crystalline silicon. White-light illumination at room temperature leads to the formation of a defect which is associated with a donor level at 0.33 eV above the valence band. This defect is stable up to about 175 deg. C where it dissociates reversibly in case of small iron concentrations and irreversibly for high iron concentrations. Since marker experiments using gold and platinum diffusion show a high vacancy concentration after AlG a tentative identification of the new defect as the metastable iron-vacancy pair is proposed.
OSTI ID:
21476426
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 4 Vol. 108; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English