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Title: Implantation of high-energy ions produced by femtosecond laser pulses

Journal Article · · Quantum Electronics (Woodbury, N.Y.)
; ; ;  [1];  [2]
  1. International Laser Center, M. V. Lomonosov Moscow State University, Moscow (Russian Federation)
  2. Department of Physics, M.V. Lomonosov Moscow State University, Moscow (Russian Federation)

Germanium ions of an expanding plasma were implanted in a silicon collector. The plasma was produced by a femtosecond laser pulse with an intensity of {approx}10{sup 15} W cm{sup -2} at the surface of the solid-state target. A technique was proposed for determining the energy characteristics of the ion component of the laser plasma from the density profile of the ions implanted in the substrate. (interaction of laser radiation with matter. laser plasma)

OSTI ID:
21470684
Journal Information:
Quantum Electronics (Woodbury, N.Y.), Vol. 35, Issue 1; Other Information: DOI: 10.1070/QE2005v035n01ABEH002754; ISSN 1063-7818
Country of Publication:
United States
Language:
English