Cluster Generation Under Pulsed Laser Ablation Of Compound Semiconductors

Journal Article · Fri Oct 08 00:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3507174· OSTI ID:21454850

Bulgakov, Alexander V; Evtushenko, Anton B; Shukhov, Yuri G ^[1]; Ozerov, Igor; Marine, Wladimir ^[2]

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1. Institute of Thermophysics SB RAS, Lavrentyev Ave. 1, 630090 Novosibirsk (Russian Federation)
2. Universite de la Mediterranee, CINaM, UPR CNRS 3118, 13288 Marseille (France)

A comparative experimental study of pulsed laser ablation in vacuum of two binary semiconductors, zinc oxide and indium phosphide, has been performed using IR- and visible laser pulses with particular attention to cluster generation. Neutral and cationic Zn{sub n}O{sub m} and In{sub n}P{sub m} particles of various stoichiometry have been produced and investigated by time-of-flight mass spectrometry. At ZnO ablation, large cationic (n>9) and all neutral clusters are mainly stoichiometric in the ablation plume. In contrast, indium phosphide clusters are strongly indium-rich with In{sub 4}P being a magic cluster. Analysis of the plume composition upon laser exposure has revealed congruent vaporization of ZnO and a disproportionate loss of phosphorus by the irradiated InP surface. Plume expansion conditions under ZnO ablation are shown to be favorable for stoichiometric cluster formation. A delayed vaporization of phosphorus under InP ablation has been observed that results in generation of off-stoichiometric clusters.

• OSTI ID: 21454850
• Journal Information: AIP Conference Proceedings, Vol. 1278, Issue 1; Conference: International symposium on high power laser ablation 2010, Santa Fe, NM (United States), 18-22 Apr 2010; Other Information: DOI: 10.1063/1.3507174; (c) 2010 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABLATION
EVAPORATION
INDIUM
INDIUM PHOSPHIDES
LASER RADIATION
MASS SPECTROSCOPY
PARTICLES
PHOSPHORUS
PLASMA EXPANSION
PLUMES
PULSED IRRADIATION
SEMICONDUCTOR MATERIALS
SOLID CLUSTERS
STOICHIOMETRY
TIME-OF-FLIGHT METHOD
ZINC OXIDES
CHALCOGENIDES
ELECTROMAGNETIC RADIATION
ELEMENTS
EXPANSION
INDIUM COMPOUNDS
IRRADIATION
MATERIALS
METALS
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
RADIATIONS
SPECTROSCOPY
ZINC COMPOUNDS