Excimer KrF laser with He buffer gas, 0.8 J energy, and 2% efficiency

Journal Article · Mon Aug 31 00:00:00 EDT 1998 · Quantum Electronics (Woodbury, N.Y.)

DOI:https://doi.org/10.1070/QE1998V028N08ABEH001202· OSTI ID:21442579

Zhupikov, A A; Razhev, A M ^[1]

---

1. Institute of Laser Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk (Russian Federation)

An experimental investigation was made of the energy and temporal characteristics of the pump process and of the output radiation of a pulsed gas-discharge excimer KrF laser ({lambda} =248 nm) with He as the buffer gas. An RU-65 spark gap was used as the design base. The parameters of a high-voltage excitation circuit of the LC inverter type with automatic UV preionisation were optimised. A laser efficiency (based on the stored energy) of 2.4% and an output radiation energy of 0.57 J were reached for the first time for a gaseous medium of the He:Kr:F{sub 2}= 89.8:10:0.2 composition at a total pressure of 2.5 bar. The maximum output energy of the KrF laser was 0.82 J in the form of pulses of 24 ns duration at half-amplitude; the specific output energy was then 5.9 J litre{sup -1} and the efficiency was 2.0%. (lasers, active media)

• OSTI ID: 21442579
• Journal Information: Quantum Electronics (Woodbury, N.Y.), Vol. 28, Issue 8; Other Information: DOI: 10.1070/QE1998v028n08ABEH001202; ISSN 1063-7818
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AMPLITUDES
EFFICIENCY
ELECTRIC POTENTIAL
EXCITATION
GAS DISCHARGE TUBES
HELIUM
INVERTERS
KRYPTON FLUORIDE LASERS
OPTICAL PUMPING
PULSES
SPARK GAPS
STORED ENERGY
ELECTRICAL EQUIPMENT
ELECTRON TUBES
ELEMENTS
ENERGY
ENERGY-LEVEL TRANSITIONS
EQUIPMENT
EXCIMER LASERS
FLUIDS
GAS LASERS
GASES
LASERS
NONMETALS
PHYSICAL PROPERTIES
PUMPING
RARE GASES
THERMODYNAMIC PROPERTIES