Correlation between excitation temperature and electron temperature with two groups of electron energy distributions

Journal Article · Fri Oct 15 04:00:00 EDT 2010 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.3486093· OSTI ID:21421296

Park, Hoyong; Choe, Wonho ^[1]; You, S J ^[2]

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1. Department of Physics, Korea Advanced Institute of Science and Technology, 335 Gwahangno, Yuseong-gu, Daejeon 305-701 (Korea, Republic of)
2. Korea Research Institute of Standards and Science, P. O. Box 102, Yuseong-gu, Daejeon 305-600 (Korea, Republic of)

The relationship between the electron excitation temperature (T{sub exc}) determined by optical emission spectroscopy and the electron temperature (T{sub e}) using a rf-compensated Langmuir probe was investigated in argon capacitively coupled plasmas. In the experiment performed at the gas pressure range of 30 mTorr to 1 Torr and the rf power range of 5-37 W, the electron energy probability function (EEPF) obtained from the probe current versus voltage characteristic curve showed two energy groups of electrons. The measured EEPF demonstrated that the electron energy distribution changed from Druyvesteyn to single Maxwellian as the discharge current was increased and from bi-Maxwellian to Druyvesteyn as the pressure was increased. As a result, T{sub exc} showed a tendency identical to that of T{sub e} of the high energy part of electrons as pressure and rf power were varied. This suggests that electron temperature can be determined from the measured T{sub exc} through a calibration experiment by which the ratio between electron and excitation temperatures is measured.

• OSTI ID: 21421296
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 10 Vol. 17; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
CORRELATIONS
ELECTRIC PROBES
ELECTRON TEMPERATURE
ELECTRONS
ELEMENTARY PARTICLES
ELEMENTS
EMISSION SPECTROSCOPY
ENERGY SPECTRA
ENERGY-LEVEL TRANSITIONS
EXCITATION
FERMIONS
FLUIDS
GASES
LANGMUIR PROBE
LEPTONS
NONMETALS
PLASMA
PLASMA DIAGNOSTICS
PROBES
RARE GASES
SPECTRA
SPECTROSCOPY