Development of Hard X-ray Imaging Optics with Two Pairs of Elliptical and Hyperbolic Mirrors

Journal Article · Wed Jun 23 04:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3463187· OSTI ID:21413458

Matsuyama, S; Fujii, M; Wakioka, T; Mimura, H; Handa, S; Kimura, T ^[1]; Nishino, Y; Tamasaku, K; Makina, Y; Ishikawa, T ^[2]; Yamauchi, K ^[1]

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1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
2. SPring-8/RIKEN, 1-1-1 Kouto, Sayoucho, Sayogun, Hyogo 679-5148 (Japan)

To form a magnified hard X-ray image with a 50 nm resolution, we have studied total reflection mirror optics with two pairs of elliptical and hyperbolic mirrors, which is called 'Advanced Kirkpatrick-Baez system'. A designed optical system has 200x and 300x magnifications in vertical and horizontal directions. Also diffraction limit size in the optical system is 40 nmx45 nm. We fabricated a pair of elliptical and hyperbolic mirrors for horizontal imaging with a figure accuracy of 2 nm using elastic emission machining (EEM), microstitching interferometry (MSI) and relative-angle-determinable stitching interferometry (RADSI). One-dimensional tests for forming a demagnified image of a slit were carried out at an X-ray energy of 11.5 keV at BL29XUL (EH2) of SPring-8. As a result, a shape beam with a FWHM of 78 nm was observed. This demonstrates that we realized one-dimensional Wolter optics that has a spatial resolution of 78 nm.

• OSTI ID: 21413458
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1234; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCURACY
BEAMS
COHERENT SCATTERING
DIFFRACTION
ELECTROMAGNETIC RADIATION
EMISSION
ENERGY RANGE
HARD X RADIATION
INTERFEROMETRY
IONIZING RADIATIONS
KEV RANGE
KEV RANGE 10-100
MICROSCOPES
ONE-DIMENSIONAL CALCULATIONS
OPTICAL SYSTEMS
RADIATION SOURCES
RADIATIONS
REFLECTION
RESOLUTION
SCATTERING
SPATIAL RESOLUTION
SPRING-8 STORAGE RING
STORAGE RINGS
SYNCHROTRON RADIATION SOURCES
X RADIATION