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Swift-heavy-ion-induced damage formation in III-V binary and ternary semiconductors

Journal Article · · Physical Review. B, Condensed Matter and Materials Physics
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  1. Department of Electronic Materials Engineering, Research School of Physics and Engineering, Australian National University, Canberra, Australian Capital Territory 0200 (Australia)
Damage formation in InP, GaP, InAs, GaAs, and the related ternary alloys Ga{sub 0.50}In{sub 0.50}P and Ga{sub 0.47}In{sub 0.53}As irradiated at room temperature with 185 MeV Au ions was studied using Rutherford backscattering spectroscopy in channeling configuration, transmission electron microscopy, and small-angle x-ray scattering. Despite nearly identical ion-energy loss in these materials, their behavior under swift-heavy-ion irradiation is strikingly different: InP and Ga{sub 0.50}In{sub 0.50}P are readily amorphized, GaP and GaAs remain almost undamaged and InAs and Ga{sub 0.47}In{sub 0.53}As exhibit intermediate behavior. A material-dependent combination of irradiation-induced damage formation and annealing is proposed to describe the different responses of the III-V materials to electronic energy loss.
OSTI ID:
21366684
Journal Information:
Physical Review. B, Condensed Matter and Materials Physics, Journal Name: Physical Review. B, Condensed Matter and Materials Physics Journal Issue: 7 Vol. 81; ISSN 1098-0121
Country of Publication:
United States
Language:
English