Microstructure and texture developments in multiple pulses excimer laser crystallization of GaAs thin films
- School of Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164 (United States)
- School of Industrial Engineering, Purdue University, West Lafayette, Indiana 47906 (United States)
In this paper, we observed and characterized changes in the microstructure and texture during recrystallization and grain growth in polycrystalline GaAs thin films using multiple pulses crystallization by a KrF excimer laser. Films of various thicknesses were studied to assess film thickness and laser energy density effects. In the low temperature domain corresponding to the partial melting regime, normal grain growth was observed. In the superlateral grain growth regime the increase in grain size was notable with grain sizes much greater than the film thickness. A bimodal grain size distribution emerged implying the onset of secondary grain growth. The change in grain size distribution, texture, and grain boundary texture were analyzed using scanning electron microscopy and electron backscatter diffraction. It was found that grain growth is accompanied by a strengthening in (001) texture, indicating that the grain growth phenomenon is strain energy driven. The experimental results are explained with theory of secondary grain growth in thin films.
- OSTI ID:
- 21356130
- Journal Information:
- Journal of Applied Physics, Vol. 105, Issue 9; Other Information: DOI: 10.1063/1.3124601; (c) 2009 American Institute of Physics; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
BACKSCATTERING
CRYSTAL STRUCTURE
CRYSTALLIZATION
ELECTRON DIFFRACTION
ENERGY DENSITY
GALLIUM ARSENIDES
GRAIN BOUNDARIES
GRAIN GROWTH
GRAIN SIZE
KRYPTON FLUORIDE LASERS
MELTING
POLYCRYSTALS
PULSES
RECRYSTALLIZATION
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR LASERS
SEMICONDUCTOR MATERIALS
TEXTURE
THIN FILMS
ARSENIC COMPOUNDS
ARSENIDES
COHERENT SCATTERING
CRYSTALS
DIFFRACTION
ELECTRON MICROSCOPY
EXCIMER LASERS
FILMS
GALLIUM COMPOUNDS
GAS LASERS
LASERS
MATERIALS
MICROSCOPY
MICROSTRUCTURE
PHASE TRANSFORMATIONS
PNICTIDES
SCATTERING
SEMICONDUCTOR DEVICES
SIZE
SOLID STATE LASERS