High accuracy subwavelength distance measurements: A variable-angle standing-wave total-internal-reflection optical microscope

Journal Article · Wed Apr 15 00:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3116561· OSTI ID:21356123

Haynie, A; Min, T -J ^[1]; Luan, L ^[1]; Mu, W ^[1]; Ketterson, J B ^[1]

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1. Department of Physics and Astronomy, Northwestern University, Evanston, Illinois 60208 (United States)

We describe an extension of the total-internal-reflection microscopy technique that permits direct in-plane distance measurements with high accuracy (<10 nm) over a wide range of separations. This high position accuracy arises from the creation of a standing evanescent wave and the ability to sweep the nodal positions (intensity minima of the standing wave) in a controlled manner via both the incident angle and the relative phase of the incoming laser beams. Some control over the vertical resolution is available through the ability to scan the incoming angle and with it the evanescent penetration depth.

• OSTI ID: 21356123
• Journal Information: Journal of Applied Physics, Vol. 105, Issue 8; Other Information: DOI: 10.1063/1.3116561; (c) 2009 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
OPTICAL MICROSCOPES
OPTICAL MICROSCOPY
PENETRATION DEPTH
REFLECTION
RESOLUTION
STANDING WAVES
MICROSCOPES
MICROSCOPY