Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma
- Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)
Electron energy distribution function (EEDF) measurements were conducted in nitrogen gas inductively coupled plasma (ICP). At a low ICP power (capacitive mode) and a high gas pressure, the measured EEDF had an unusual distribution with a hole near this electron energy of 3 eV. This distribution is primarily due to vibrational excitation collisions because the vibrational cross section has a sharp peak at the electron energy in nitrogen gas. However, the EEDF evolved into a Maxwellian distribution and the hole disappeared, when the discharge mode transition from E mode to H mode occurred. This evolution of the EEPF can be understood by the electron-electron collision effect, and it occurs when the electron-electron collision time become shorter than the electron residence time.
- OSTI ID:
- 21347211
- Journal Information:
- Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 3 Vol. 17; ISSN PHPAEN; ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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