Potential applications of PECVD in inorganic membrane preparation and surface modification
- Ecole Nationale Superieure de Chimie, Montpellier (France); and others
Up to now sol-gel processing arises as the main technique to prepare meso or microporous inorganic membranes. Other techniques can be pointed out with potential application in membrane processing. One of them is PECVD (plasma enhanced chemical vapor deposition). Because of the ability to work at low temperature and to generate a large range of materials (metal, polymer, oxide, carbide, nitride {hor_ellipsis}), PECVD can be advantageously used to modify the surface of existing membranes or to prepare active layers for membrane application. These two approaches are illustrated respectively with the surface modification of a zirconia membrane by a fluorinated polymer and the preparation of a supported silicon carbide microporous membrane. Tubular and flat porous supports have been used for membrane coating. Main results are reported dealing with membrane preparation using a PECVD reactor.
- OSTI ID:
- 213144
- Report Number(s):
- CONF-940713--
- Country of Publication:
- United States
- Language:
- English
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