Pressure dependent resonant frequency of micromechanical drumhead resonators

Journal Article · Mon May 25 00:00:00 EDT 2009 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3141731· OSTI ID:21294110

Southworth, D R; Craighead, H G; Parpia, J M ^[1]

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1. Center for Materials Research, Cornell University, Ithaca, New York 14853 (United States)

We examine the relationship between squeeze film effects and resonance frequency in drum-type resonators. We find that the resonance frequency increases linearly with pressure as a result of the additional restoring force contribution from compression of gas within the drum cavity. We demonstrate trapping of the gas by squeeze film effects and geometry. The pressure sensitivity is shown to scale inversely with cavity height and sound radiation is found to be the predominant loss mechanism near and above atmospheric pressure. Drum resonators exhibit linearity and sensitivity suitable to barometry from below 10 Torr up to several atmospheres.

• OSTI ID: 21294110
• Journal Information: Applied Physics Letters, Vol. 94, Issue 21; Other Information: DOI: 10.1063/1.3141731; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATMOSPHERES
ATMOSPHERIC PRESSURE
BAROMETERS
FILMS
PRESSURE DEPENDENCE
RESONATORS
SENSORS
SOUND WAVES