Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

Dolleman, Robin J.; Chakraborty, Debadi; Ladiges, Daniel R.; van der Zant, Herre S. J.; Sader, John E.; Steeneken, Peter G.

doi:10.1021/acs.nanolett.1c02237

Title: Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

Journal Article · Mon Aug 30 00:00:00 EDT 2021 · Nano Letters

DOI:https://doi.org/10.1021/acs.nanolett.1c02237· OSTI ID:1817774

^[1]; Chakraborty, Debadi ^[2]; Ladiges, Daniel R. ^[3];

^[4];

^[2]; Steeneken, Peter G. ^[5]

Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands, ARC Centre of Excellence in Exciton Science, School of Mathematics and Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
ARC Centre of Excellence in Exciton Science, School of Mathematics and Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
ARC Centre of Excellence in Exciton Science, School of Mathematics and Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia, Center for Computational Sciences and Engineering, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, United States
Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands

The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high-frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure-sensing applications. Here, we study the squeeze-film effect in single-layer graphene resonators and find that their resonance frequency is lower than expected from models assuming ideal compression. To understand this deviation, we perform Boltzmann and continuum finite-element simulations and propose an improved model that includes the effects of gas leakage and can account for the observed pressure dependence of the resonance frequency. Thus, this work provides further understanding of the squeeze-film effect and provides further directions into optimizing the design of squeeze-film pressure sensors from 2D materials.

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Research Organization:: Univ. of California, Oakland, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Advanced Scientific Computing Research (ASCR)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1817774

Alternate ID(s):: OSTI ID: 1821591

Journal Information:: Nano Letters, Journal Name: Nano Letters Vol. 21 Journal Issue: 18; ISSN 1530-6984

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Title: Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

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