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Potential structure in a sheath formed in front of a metal wall

Conference ·
OSTI ID:212843
; ;  [1]
  1. Nagoya Institute of Technology, Nagoya (Japan)
In spite of many investigations since Langmuir`s pioneering works, there has still remained an essential ambiguity for a sheath formed in a plasma-wall region. The ambiguity is partially due to the difficulty in detection of the sheath structure by a Langmuir probe. Using an emissive probe has, however, provided a meaningful information on a potential in a pre-sheath region. The Bohm`s pre-sheath model is that ions should be accelerated within the sheath such that their density is larger than the electron one, deducing the well-known Bohm`s criterion. There have been some approaches to describe the plasma-sheath transition by a set of hydrodynamic equations and the Poisson one. Such an approach has, however, not overcome a distinct discrepancy between the analytical and experimental results. The aim of the present paper is to describe the potential structure detected in a plasma-sheath region formed near a metal wall immersed in a homogeneous low pressure Ar plasma. And an analysis using a set of the hydrodynamic and Poisson equations is described.
OSTI ID:
212843
Report Number(s):
CONF-950749--
Country of Publication:
United States
Language:
English

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