Improved double planar probe data analysis technique
Journal Article
·
· Review of Scientific Instruments
- Department of Engineering Physics, University of Wisconsin-Madison, Madison, Wisconsin 53706 (United States)
Plasma electron number density and ion number density in a dc multidipole weakly collisional Ar plasma are measured with a single planar Langmuir probe and a double planar probe, respectively. A factor of two discrepancy between the two density measurements is resolved by applying Sheridan's empirical formula [T. E. Sheridan, Phys. Plasmas 7, 3084 (2000)] for sheath expansion to the double probe data.
- OSTI ID:
- 21266768
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 3 Vol. 80; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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