The rotation of ripple pattern and the shape of the collision cascade in ion sputtered thin metal films

Journal Article · Sat Nov 01 04:00:00 EDT 2008 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3006137· OSTI ID:21185898

Mishra, P; Ghose, D ^[1]

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1. Saha Institute of Nuclear Physics, Sector-I, Block-AF, Bidhan Nagar, Kolkata 700064 (India)

The sputter ripple formation in polycrystalline metal thin films of Al, Co, Cu, and Ag has been studied by 16.7 keV Ar{sup +} and O{sub 2}{sup +} ion bombardment as a function of angle of ion incidence. The experimental results show the existence of a critical angle of ion incidence ({theta}{sub c}) beyond which the ripples of wave vectors perpendicular to the projected ion beam direction appear. Monte Carlo simulation (SRIM) is carried out to calculate the depth, longitudinal and lateral straggling widths of energy deposition as these values are crucial in determining the critical angle {theta}{sub c}. It is found that the radial energy distribution of the damage cascade has the maximum slightly away from the ion path in contradiction to the Gaussian distribution and the distribution is better characterized by an exponential function. The lower values of lateral straggling widths as those extracted from the measured critical angles using the Bradley and Harper theory indicate a highly anisotropic deposited-energy distribution.

• OSTI ID: 21185898
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 9 Vol. 104; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM
ANISOTROPY
ARGON IONS
COBALT
COMPUTERIZED SIMULATION
COPPER
ENERGY SPECTRA
GAUSS FUNCTION
ION BEAMS
KEV RANGE 10-100
MONTE CARLO METHOD
OXYGEN IONS
POLYCRYSTALS
SILVER
SPUTTERING
THIN FILMS