Electron-shading effect on the horizontal aligned growth of carbon nanotubes
- Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong (China)
Based on the well-accepted electron-shading theory during plasma processing, we designed microstructures to control the local built-in electric-field on the substrate surface. The distortion magnitude of the electric-field is largest near the sidewalls of the microstructures, creating a horizontal electric-field in this region. We showed that the horizontally aligned carbon nanotubes (CNTs) were grown by making use of this built-in electric-field during the plasma-enhanced chemical vapor deposition process, with a tactical choice of geometries and materials of the microstructures on the substrate. This technique opens up a way to selectively and controllably grow horizontally aligned CNTs on the substrate surface.
- OSTI ID:
- 21175934
- Journal Information:
- Applied Physics Letters, Vol. 94, Issue 4; Other Information: DOI: 10.1063/1.3077155; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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