Generation of space charge compensated low energy ion flux

Journal Article · Fri Feb 15 04:00:00 EST 2008 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2823891· OSTI ID:21123663

Vizir, A V; Shandrikov, M V; Oks, E M ^[1]

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1. Institute of High Current Electronics, Siberian Division of Russian Academy of Science, Tomsk 634055 (Russian Federation)

The results of an experimental study of low-energy (<200 eV) ion flux generation with space charge neutralization are presented. Argon was used as a working gas. The working gas pressure in the vacuum chamber was 2-4x10{sup -2} Pa. Ion beam was extracted from the hollow cathode of main discharge plasma by a single mesh extractor with subsequent deceleration of ions to a required energy in a layer between the mesh and the beam plasma. The ion beam current was measured on the collector located on the distance of 30-60 cm from the discharge system. The penetration of electron component from the main discharge plasma through the mesh into the region of the ion beam drift space was realized by potential barrier reduction, in conditions of the optimal extractor potential with respect to the hollow cathode. The space charge neutralization of low-energy ion beam resulted in drift space plasma potential reduction and ion beam current growth. At the main discharge current of 1 A and main discharge voltage of 300 V, the ion beam current of up to 100 mA with the ion energy of 50-150 eV was obtained.

• OSTI ID: 21123663
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 79; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCELERATION
ARGON
DISTANCE
ELECTRIC CURRENTS
ELECTRONS
EV RANGE
EXTRACTION
GLOW DISCHARGES
HOLLOW CATHODES
ION BEAMS
ION SOURCES
PLASMA
PLASMA POTENTIAL
POTENTIALS
SPACE
SPACE CHARGE