Characteristics of molecular hydrogen and CH* radicals in a methane plasma in a magnetically enhanced capacitive RF discharge

Journal Article · Sat Sep 15 00:00:00 EDT 2007 · Plasma Physics Reports

DOI:https://doi.org/10.1134/S1063780X07090073· OSTI ID:21100138

Avtaeva, S V; Lapochkina, T M ^[1]

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1. Kyrgyz-Russian Slavic University (Kyrgyzstan)

The parameters of a methane-containing plasma in an asymmetric RF capacitive discharge in an external magnetic field were studied using optical emission spectroscopy. The power deposited in the discharge was 90 W and the gas pressure and magnetic field were varied in the ranges 1-5 Pa and 50-200 G, respectively. The vibrational and rotational temperatures of hydrogen molecules and CH* radicals were measured as functions of the magnetic field and methane pressure. The ratio between the densities of atomic and molecular hydrogen was estimated. The processes responsible for the excitation of molecular hydrogen and CH* radicals in a methane-containing plasma in an RF capacitive discharge are analyzed.

• OSTI ID: 21100138
• Journal Information: Plasma Physics Reports, Vol. 33, Issue 9; Other Information: DOI: 10.1134/S1063780X07090073; Copyright (c) 2007 Nauka/Interperiodica; Article Copyright (c) 2007 Pleiades Publishing, Ltd; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-780X
• Country of Publication: United States
• Language: English

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
ASYMMETRY
DENSITY
EMISSION SPECTROSCOPY
EXCITATION
HYDROGEN
MAGNETIC FIELDS
METHANE
MOLECULES
PLASMA
RADICALS