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Effect of ultrasonic treatment on the generation characteristics of irradiated silicon-silicon-dioxide interface

Journal Article · · Semiconductors
;  [1]
  1. National Uzbekistan University (Uzbekistan)
The method of relaxation of nonequilibrium capacitance in the metal-oxide-semiconductor structure is used to study the effect of ultrasonic treatment on the generation characteristics of the Si-SiO{sub 2} interface irradiated with {gamma}-ray photons. It is found that the generation lifetime decreases under the effect of ultrasonic treatment. It is shown that variations in the generation parameters caused by ultrasonic treatment are radically different in the irradiated and unirradiated structures.
OSTI ID:
21088509
Journal Information:
Semiconductors, Journal Name: Semiconductors Journal Issue: 7 Vol. 40; ISSN SMICES; ISSN 1063-7826
Country of Publication:
United States
Language:
English

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