Beamlines on Indus-1 and Indus-2 for X-ray Multilayer Optics and Micro Fabrication Research

Journal Article · Fri Jan 19 00:00:00 EST 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2436343· OSTI ID:21049301

Lodha, G S; Dhamgaye, V P; Modi, M H; Nayak, M; Sinha, A K; Nandedkar, R V ^[1]

---

1. Synchrotron Utilisation and Material Research Division, Raja Ramanna Centre for Advanced Technology, Indore-452 013 (India)

A soft X-ray/extreme ultra violet (EUV) reflectometry beamline is operational at Indus-1 synchrotron source. The beamline is used for the characterization of multilayer optics for EUV lithography. A soft/deep X-ray lithography beamline is being set up on Indus-2, for undertaking research activities on micro electro mechanical systems (MEMS) and sub micron X-ray lithography structures. Present status of these beamlines is presented.

• OSTI ID: 21049301
• Journal Information: AIP Conference Proceedings, Vol. 879, Issue 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436343; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
BEAM PRODUCTION
ELECTROMECHANICS
FABRICATION
INDUS-1
INDUS-2
LAYERS
MICROSTRUCTURE
OPTICS
SOFT X RADIATION
ULTRAVIOLET RADIATION