Beamlines on Indus-1 and Indus-2 for X-ray Multilayer Optics and Micro Fabrication Research
Journal Article
·
· AIP Conference Proceedings
- Synchrotron Utilisation and Material Research Division, Raja Ramanna Centre for Advanced Technology, Indore-452 013 (India)
A soft X-ray/extreme ultra violet (EUV) reflectometry beamline is operational at Indus-1 synchrotron source. The beamline is used for the characterization of multilayer optics for EUV lithography. A soft/deep X-ray lithography beamline is being set up on Indus-2, for undertaking research activities on micro electro mechanical systems (MEMS) and sub micron X-ray lithography structures. Present status of these beamlines is presented.
- OSTI ID:
- 21049301
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 879; ISSN APCPCS; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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