Soft X-ray Zone Plate Microscopy to 10 nm Resolution with XM-1 at the ALS

Journal Article · Thu Jan 18 23:00:00 EST 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2436295· OSTI ID:21049255

Weilun, Chao; Attwood, David T ^[1]; Anderson, Erik H; Harteneck, Bruce D; Liddle, J Alexander ^[2]

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1. University of California, Berkeley, California, CA 94720 (United States)
2. Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California, CA 94720 (United States)

Soft x-ray zone plate microscopy provides a unique combination of capabilities that complement those of electron and scanning probe microscopies. Tremendous efforts are taken worldwide to achieve sub-10 nm resolution, which will permit extension of x-ray microscopy to a broader range of nanosciences and nanotechnologies. In this paper, the overlay nanofabrication technique is described, which permits zone width of 15 nm and below to be fabricated. The fabrication results of 12 nm zone plates, and the stacking of identical zone patterns for higher aspect ratio, are discussed.

• OSTI ID: 21049255
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 879; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ADVANCED LIGHT SOURCE
ASPECT RATIO
ELECTRONS
MICROSCOPY
NANOSTRUCTURES
PLATES
RESOLUTION
SOFT X RADIATION