Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere

Journal Article · Mon Feb 11 00:00:00 EST 2008 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2842427· OSTI ID:21016326

Park, Ki Wan; Lee, Tae Il; Hwang, Hyeon Seok; Noh, Joo Hyon; Baik, Hong Koo ^[1]; Song, Kie Moon ^[2]

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1. Department of Materials Science and Engineering, Yonsei University, Seoul 120-749 (Korea, Republic of)
2. Department of Applied Physics, Konkuk University, Chungju (Korea, Republic of)

We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a 200 {mu}m diameter at 9 mA and the optimum value of gas velocityxdiameter for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of E/N strength for 200 {mu}m (0.31 m{sup 2}/s) and 500 {mu}m (0.78 m{sup 2}/s) air discharge at 8 mA under the velocity of 156 m/s. As a result, an increase of 46.7% in E/N strength of the discharge of 200 {mu}m hole was obtained compare to that of 500 {mu}m.

• OSTI ID: 21016326
• Journal Information: Applied Physics Letters, Vol. 92, Issue 6; Other Information: DOI: 10.1063/1.2842427; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AIR
ATMOSPHERES
ATMOSPHERIC PRESSURE
DIRECT CURRENT
GAS FLOW
GLOW DISCHARGES
HOLLOW CATHODES
PLASMA
VELOCITY