Density measurement of particles in rf silane plasmas by the multipass laser extinction method

Journal Article · Mon Dec 17 00:00:00 EST 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2824885· OSTI ID:21016218

Seon, C R; Choe, W; Park, H Y; Kim, Junghee; Park, S; Seong, D J; Shin, Y H ^[1]

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1. Department of Physics, Korea Advanced Institute of Science and Technology, 335 Gwahangno, Yuseong-gu, Daejeon 305-701 (Korea, Republic of)

Measurement of the time evolution of the particle number density was investigated in rf silane plasmas by using the multipass laser extinction method. A He-Ne laser beam underwent multiple reflections on one horizontal plane of the plasma. The extinction signal increased in proportion to the beam pass numbers. A 10{sup 11} cm{sup -3} density of 8 nm radius particles was measured at 10 s in a 32 mTorr and 50 W discharge using nine passes. The primary particle density was obtained by comparing the measured particle sizes with the calculated sizes from the light extinction signals and the Brownian free molecule coagulation model.

• OSTI ID: 21016218
• Journal Information: Applied Physics Letters, Vol. 91, Issue 25; Other Information: DOI: 10.1063/1.2824885; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BROWNIAN MOVEMENT
DENSITY
HELIUM-NEON LASERS
LASER SPECTROSCOPY
PARTICLE SIZE
PARTICLES
PLASMA
PRESSURE RANGE PA
SIGNALS
SILANES