Powder evolution at low powers in silane-argon discharge
- Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Calcutta 700032 (India)
Powder formation in a 13.56-MHz radio frequency (rf) capacitive glow discharge plasma of silane-argon mixture has been studied by in situ laser light-scattering measurements. The rf power density (P{sub rf}) was varied from 18 to 53 mW/cm{sup 2}. At high P{sub rf} the light scattering occurs all along the discharge and extends even beyond the exit end of the electrodes toward the pumping system. With decreasing P{sub rf} the maximum intensity of the light scattering decreases and the scattering zone shrinks and moves toward the exit end. With P{sub rf}{approx_equal}20 mW/cm{sup 2} a very bright scattering zone only a few centimeters wide appears located at the electrodes outlet. The powders studied by transmission electron microscopy did not show a drastic decrease of their sizes with P{sub rf} though clear coagulation of small particles is observed at high P{sub rf}. In this paper we have tried to link the laser light-scattering evolution with P{sub rf} to various parameters such as the microstructure factor, the deposition rate, the electron mobilityxlifetime product, the density of states, and the minority-carriers diffusion length of the films in an attempt to link the effect the evolution of powder formation to the films properties.
- OSTI ID:
- 20714074
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 4 Vol. 98; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
Similar Records
High-deposition rate a-Si:H through VHF-CVD of argon-diluted silane
Use of electric probes in silane radio frequency discharges