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Microstructure of NbN epitaxial ultrathin films grown on A-, M-, and R-plane sapphire

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.2820607· OSTI ID:21016199
; ;  [1]
  1. CEA-LETI, MINATEC, 17 Avenue des Martyrs, 38054 Grenoble Cedex 9 (France)
We compared ultrathin NbN films (2.5-10 nm) simultaneously grown by dc reactive sputtering at 600 deg. C on A, M, and R orientations of sapphire substrates. Film structures and superconducting properties were characterized. We show that actual NbN device films on R-Al{sub 2}O{sub 3} are (135) oriented and suffer from detrimental disoriented twin domains. On the contrary, NbN on M-Al{sub 2}O{sub 3} is shown to be untwined, leading to a lower resistivity, an increased critical current density J{sub c} (>4 MA cm{sup -2} at 4.2 K), and a higher critical temperature T{sub c} (11.3 K for 4.4 nm). These results offer promising alternative for better performances of superconducting detectors and mixers.
OSTI ID:
21016199
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 23 Vol. 91; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English