Quantitative structural characterization of GaN quantum dot ripening using reflection high-energy electron diffraction
Journal Article
·
· Journal of Applied Physics
- DRFMC, SP2M, CEA Grenoble, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France and Universite Joseph Fourier, BP 53, 38041, Grenoble Cedex 9 (France)
Reflection high-energy electron diffraction (RHEED) was used to monitor the strain of GaN/AlN quantum dots (QDs) grown by molecular beam epitaxy. Quantitative and absolute values of the in- and out-of-plane strains of the QDs were determined and compared to reference values, obtained by x-ray diffraction measurements. A very good agreement was found between RHEED and x-ray measurements. The growth and thermal ripening of the dots were analyzed. A progressive strain relaxation was observed during the ripening stage, suggesting a morphology evolution of the dots.
- OSTI ID:
- 20982743
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 5 Vol. 101; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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